Materials for Silicon Germanium (SiGe) Film Formation
Gases for the formation of silicon germanium (SiGe) films in semiconductors, LCDs, and thin-film solar cells.)
GeH4
Gases for the formation of silicon germanium (SiGe) films in semiconductors, LCDs, and thin-film solar cells.
| Chemical name | 10% GeH4/H2 Mixture | |
|---|---|---|
| Germane(10%) | Hydrogen(90%) | |
| Cas No. | 7782-65-2 | 1333-74-0 |
| Molecular formula | GeH4 | H2 |
| Molar Weight | 76.62 g/mol | 2.03 g/mol |
| Physical State / Color | Colorless gas | Colorless gas |
| Boiling point | -88.4℃ | -252.9 ℃ |