Chemical name | Carbonyl sulfide |
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Cas No. | 463-58-1 |
Molecular formula | COS |
Molar Weight | 60.08 g/mol |
Physical State / Color | gas |
Boiling point | -50 ℃ |
ITEMS | 분자 구조 | Application |
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DRAM/NAND向 Partition E/T, Plug, Metal Contact Etch, Slit Etch 공정에 사용