반도체 소재
      Chemical name Carbonyl sulfide
      Cas No. 463-58-1
      Molecular formula COS
      Molar Weight 60.08 g/mol
      Physical State / Color gas
      Boiling point -50 ℃
      ITEMS 분자 구조 Application

      DRAM/NAND向 Partition E/T, Plug, Metal Contact Etch, Slit Etch 공정에 사용